Development of MEMS-Based Piezoelectric Microvalve Technologies
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چکیده
منابع مشابه
Analytical Approach for Vibration Analysis of a Microsensor with Two layers of Silicon and Piezoelectric based on MCST
The vibration analysis is an important step in the design and optimization of microsensors. In most of the cases, COMSOL software is employed to consider the size-dependency on the dynamic behavior in the MEMS sensors. In this paper, the Modified Couple Stress Theory (MCST) is used to capture the size effect on dynamic behavior in a microsensor with two layers of the silicon and piezoelectric. ...
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تاریخ انتشار 2007